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德國Fraunhofer IZM  
弗勞恩霍夫協會可靠性和微集成研究所多設備集成部于1998 年成立于德國薩克森地區的開姆尼斯市。基礎領域是微（納米）機電系統(MEMS) 的開發、在硅片和其他材料上制造微機電系統的技術和設備。未來，該部門還將研究應用于未來微電子、納米電子、印刷電子系統的后段制程技術，這一技術將普遍降低智能系統的應用成本，檢驗智能系統的微觀可靠性和納米可靠性。不久的將來，該系統將具有更多的功能，例如：運用硅技術或非硅技術將信號傳輸過程、信息傳輸過程中的電子與傳感器、制動器整合在一起。我們的理念就是讓所謂的多設備集成系統越來越小。
主要研究活動：
設計、開發微機電系統
● 微機電系統設計、成型
● 傳感器、制動器、電子（例如：加速傳感器、回轉儀、掃描儀）
● 變頻器、分析器（即：分光計、超聲）
● 測量和表征
后段制程(BOEL)
● 旋布絕緣層、氣隙結構、低介電值集成
● 銅互連鍍金屬設備（例如：45 納米間距）、擴散障礙層
● 尺寸縮小帶來的影響、可靠性、成型和仿真
高級技術開發
● 3D 成型、深硅刻蝕、引線合鍵、硅片鍵合、晶片鍵合技術
● 化學機械拋光
● 微機電系統晶圓級封裝
微系統可靠性和納米可靠性
● 微系統可靠性，如：汽車制造領域和IT 領域內的微系統可靠性
● 可靠性、小型化與微型安全的結合
● 熱機仿真和納米可靠性
The department Multi Device Integration was founded in 1998 and is located in Chemnitz,
Saxony. Its basic fields are the development of Micro-(Nano)-Electro-Mechanical-Systems
(MEMS), technologies and equipment for manufacturing MEMS in silicon and other
materials. Further research fields are back-end-of-line technologies for future micro and nano
electronics, printed electronic systems for ubiquitous low-cost applications and investigation
of micro and nano reliability for smart systems. In near future Microsystems will be quite
more multifunctional e. g. the integrated combination of electronics for signal and information
processing with sensors and actuators in silicon and nonsilicon technologies. The so called
multi device integration to smaller and smarter systems is our vision.
Main Research Activities:
Design and Development of MEMS
● MEMS design and modelling
● Sensors, actuators, and electronics (e. g. acceleration sensors, gyroscopes, scanner)
● Transducer and analyzer systems (i. e. spectrometer, ultra sonic)
● Measurement and characterization
Back-End-of-Line BEOL
● Spin-on dielectrics, Air Gap structures, and integration of low-k dielectrics
● Copper interconnect metallization systems (e.g. 45nm pitches) and diffusion barriers,
● Scaling effects, reliability, modelling and simulation
Development of Advanced Technologies
● 3D-patterning, deep silicon etching and wire, chip and wafer bonding technologies,
● Chemical mechanical planarization (CMP)
● MEMS Packaging at wafer level
Micro and Nano Reliability
● Reliability for Microsystems e. g. for Automotive and IT applications
● Combination of Reliability, Miniaturization and Microsecurity
● Thermomechanical Simulation and Reliability for Nanoelectronics
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總部
Fraunhofer IZM
Chemnitz Branch of the Institute
Multi Device Integration
Reichenhainer Strasse 88
D-09126 Chemnitz