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The XDS pumps are an innovative new design which use a patented bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS-C range are designed for pumping condensable vapors and use materials selected for a wide range of laboratory wet chemistry applications.

• Displacement (swept volume)
  - 50 Hz: 3.4 cfm (

  5.7 m3

  h-1) XDS5
  - 60 Hz: 4.0 cfm (

  6.7 m3

  h-1) XDS5

• Pneurop pumping speed
  - 50 Hz: 2.8 cfm (

  4.8 m3

  h-1) XDS5
  - 60 Hz: 3.5 cfm (

  6.0 m3

  h-1) XDS5

• Ultimate vacuum (total pressure): 0.07 mbar (0.05 torr)

• Exhaust connection: DN25NW

• Mass
  -

  51 lb

  (

  23 kg

  )
  -

  54 lb

  (

  24.5 kg

  )

• Motor Supply Voltage
  - 50 Hz 1 phase: 110V or 220 -240 V
  - 60 Hz 1 phase: 115V - 120 V or 230 - 240 V
  - 50 Hz 3 phase: 200V - 220 V or 380 - 415 V
  - 60 Hz 3 phase: 220V - 230 V or 460 - 0.3 kV

• Power: 0.3 kW

• Inlet connection: DN25NW

• Operating temperature:

  50 °F

  to

  140 °F

  (

  10 °C

  to

  40 °C

  )

• Storage temperature:

  -22 °F

  to

  158 °F

  (

  -30 °C

  to

  70 °C

  )

• Noise level @ ultimate (at 1 metre): 55 dB(A)

• Vibration:<1.5 mms-1(rms)

• Leak tightness (static):<7.5 x 10 -7torr/s (< 10-6 mbar/s)

• Water vapor handling (GB1 flow): 70 gh -1

• Water vapor handling (GB2 flow): >200 gh -1

Applications

XDS
? Scanning electron microscopes
? Ion implanters (beamline and end stations)
? General clean pumping applications
? Sputtering
? Turbo pump backing
? Rare gas re-circulation
XDS-C
? Gel drying
? Rotary evaporation
? Centrifugal concentration
? Vacuum ovens
? Glove boxes

COMPLETELY DRY, LUBRICANT-FREE VACUUM PUMP WITH VAPOR HANDLING Innovative XDS Dry Pumps were designed by Edwards (formerly BOC Edwards) to provide vacuum totally free of lubricants. Bearings are isolated from the vacuum environment by a patented XDS bearing shield. Uniquely, there are no bearings, grease or oil under vacuum and no bearing purge. Controllable gas ballast is standard and makes the XDS suitable for pumping condensable vapors.The versatile XDS uses a scroll mechanism and is manufactured by Edwards? , the market leader in dry pumping products and technology. This pump is portable, aircooled and cost effective. Power consumption is very low and, typically, no other utilities are required. XDS vibration and noise levels make it ideal for laboratory use. The XDS is truly user serviceable; with no oil to change, annual maintenance can typically be completed in about 10 minutes without special tools.